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Deep reactive-ion etching
Results: 81

#	Item
51	Fraunhofer IMS F RAU N HOF E R I NST I T U T E F O R M IC RO E L EC T RO N I C C I RCU I T S A N D SYS T E MS I MS Add to Reading List Source URL: www.ims.fraunhofer.de Language: English - Date: 2014-02-15 05:02:23 Technology Microelectromechanical systems Etching Wafer Photoresist Stepper Deep reactive-ion etching Cleanroom Applied Materials Semiconductor device fabrication Materials science Microtechnology
52	Marvell NanoLab Member login Lab Manual Contents Add to Reading List Source URL: nanolab.berkeley.edu Language: English - Date: 2012-11-20 13:15:45 Microtechnology Microelectromechanical systems Wafer Chemical vapor deposition Deep reactive-ion etching Stepper Reactive-ion etching Plasma etcher Sputtering Semiconductor device fabrication Materials science Technology
53	Analytical Techniques for Trace Elemental Analyses on Wafer Surfaces for Monitoring and Controlling Contamination J. Wang, M. K. Balazs Balazs Analytical Laboratory, Sunnyvale, CA[removed]P. Pianetta, K. Baur and S. Brenna Add to Reading List Source URL: www-project.slac.stanford.edu Language: English - Date: 2003-04-14 02:31:05 Materials science Microtechnology Vapour phase decomposition Wafer X-ray fluorescence Photolithography Thermal oxidation Inductively coupled plasma mass spectrometry Deep reactive-ion etching Semiconductor device fabrication Chemistry Science
54	1– 6 February Technical Summaries www.spie.org/pw Conferences and Courses Add to Reading List Source URL: spie.org Language: English - Date: 2014-10-28 11:09:21 Technology Microelectromechanical systems Microfabrication Micro-Opto-Electro-Mechanical Systems Deep reactive-ion etching Etching Photolithography Graphene Bulk micromachining Materials science Microtechnology Semiconductor device fabrication
55	Nanoscale Strength Measurements and Standards Objective Impact and Customers • The MEMS industry currently generates revenues of about $45B/year, dominated by two non-contact devices: inkjet Add to Reading List Source URL: www.nist.gov Language: English - Date: 2012-10-04 11:43:10 Semiconductor device fabrication Glass physics Nanotechnology Etching Microelectromechanical systems Deep reactive-ion etching Nanoelectromechanical system Fracture Focused ion beam Materials science Chemistry Microtechnology
56	GENESIS CONCENTRATOR TARGET PARTICLE CONTAMINATION MAPPING AND MATERIAL IDENTIFICATION Michael J. Calaway 1, Melissa C. Rodriguez 2, and Judith H. Allton[removed]Jacobs (ESCG) at NASA Johnson Space Center, Houston, TX (2) Add to Reading List Source URL: curator.jsc.nasa.gov Language: English - Date: 2013-09-16 21:16:11 Manufacturing 10 micrometres Wafer Microsphere Deep reactive-ion etching Particle size Silicon carbide Nanoparticle Chemistry Materials science Semiconductor device fabrication
57	Microsoft Word - vh_man_2400_en_05112903_ls.doc Add to Reading List Source URL: www.nanotech.ucsb.edu Language: English - Date: 2013-01-06 22:10:47 Technology Photoresist Polymers Spin coating Resist Deep reactive-ion etching Ultraviolet Etching Photolithography Semiconductor device fabrication Materials science Microtechnology
58	Deep Si Etching at the UCSB Nanofabrication Facility Silicon Deep RIE/ICP – Bosch Si- DRIE Add to Reading List Source URL: www.nanotech.ucsb.edu Language: English - Date: 2013-01-06 22:10:49 Technology Etching Deep reactive-ion etching Microelectromechanical systems Glass etching Sulfur hexafluoride 9W Microtechnology Materials science Semiconductor device fabrication
59	GaInAs/AlInAs/InP RIE Etching at the UCSB Nanofabrication Facility Methane/Hydrogen/Argon – Parallel Plate RIE #2 Add to Reading List Source URL: www.nanotech.ucsb.edu Language: English - Date: 2013-01-06 22:10:49 Microtechnology Etching Indium gallium arsenide Deep reactive-ion etching Semiconductor device fabrication Chemistry Materials science
60	Microsoft Word - Paper 3DOF Nanopositioner_D16b_2ndReview05 Add to Reading List Source URL: www.nist.gov Language: English - Date: 2014-06-10 11:58:56 Mechanics Elasticity Actuators Mechanical engineering Microelectromechanical systems Deep reactive-ion etching Buckling XYZ Bending Materials science Microtechnology Physics

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